| Active Filters |
| | | | | | | | | | | | | |
| 214167 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.9 | kg CF4/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214168 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 1 | kg C2F6/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214169 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.04 | kg CHF3/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214170 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.05 | kg C3F8/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214171 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.04 | kg NF3/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214172 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.2 | kg SF6/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214173 | - 2F6 - Other (please specify)
| - 2.E.2 - TFT Flat Panel Display
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Thin-Film-Transistor Flat Panel Display (TFT-FPD) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.5 | g CF4/m^2 of glass processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214174 | - 2F6 - Other (please specify)
| - 2.E.2 - TFT Flat Panel Display
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Thin-Film-Transistor Flat Panel Display (TFT-FPD) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.9 | g NF3/m^2 of glass processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214175 | - 2F6 - Other (please specify)
| - 2.E.2 - TFT Flat Panel Display
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Thin-Film-Transistor Flat Panel Display (TFT-FPD) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 4 | g SF6/m^2 of glass processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214176 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | See "Comments from data provider". | | 5 | g CF4/m^2 of substrate processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214177 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | See "Comments from data provider". | | 0.2 | g CF4/m^2 of substrate processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214178 | - 2F6 - Other (please specify)
| - 2.E.4 - Heat Transfer Fluid
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Evaporation of Heat Transfer Fluids (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.3 | kg C6F14/m^2 of silicon consumed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214179 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.9 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214180 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.6 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214181 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214182 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.1 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214183 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214184 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.1 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214185 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | Cleaning method in which the film cleaning-agents formed from NF3 (F-atoms) are produced in a plasma upstream (remote) from the chamber being cleaned. NF3 used in this cleaning process is referred to as "Remote-NF3" in the 2006 IPCC Guidelines. Also, see "Comments from data provider". | | | | | 0.02 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214186 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | An in-situ NF3 cleaning process that is analogous to the process for other cleaning gases like C2F6 and C3F8. NF3 used in this cleaning process is referred to as simply "NF3" and distinguished from "Remote-NF3" in the 2006 IPCC Guidelines. Also, see "Comments from data provider". | | | | | 0.2 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
