| Active Filters |
| | | | | | | | | | | | | |
| 214167 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.9 | kg CF4/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214168 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 1 | kg C2F6/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214169 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.04 | kg CHF3/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214170 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.05 | kg C3F8/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214171 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.04 | kg NF3/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214172 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | | | 0.2 | kg SF6/m^2 of silicon processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214179 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.9 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214180 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.6 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214181 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214182 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.1 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214183 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214184 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.1 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214185 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | Cleaning method in which the film cleaning-agents formed from NF3 (F-atoms) are produced in a plasma upstream (remote) from the chamber being cleaned. NF3 used in this cleaning process is referred to as "Remote-NF3" in the 2006 IPCC Guidelines. Also, see "Comments from data provider". | | | | | 0.02 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214186 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | An in-situ NF3 cleaning process that is analogous to the process for other cleaning gases like C2F6 and C3F8. NF3 used in this cleaning process is referred to as simply "NF3" and distinguished from "Remote-NF3" in the 2006 IPCC Guidelines. Also, see "Comments from data provider". | | | | | 0.2 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214187 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Semiconductor Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.2 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214188 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of C2F6 in Semiconductor Manufacturing (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.2 | kg CF4/kg C2F6 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214189 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of CHF3 (HFC-23) in Semiconductor Manufacturing (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.07 | kg CF4/kg CHF3 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214190 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of CH2F2 (HFC-32) in Semiconductor Manufacturing (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.08 | kg CF4/kg CH2F2 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214191 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of C3F8 in Semiconductor Manufacturing (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.1 | kg CF4/kg C3F8 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
| 214192 | - 2F6 - Other (please specify)
| - 2.E.1 - Integrated Circuit or Semiconductor
| | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of c-C4F8 in Semiconductor Manufacturing (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.1 | kg CF4/kg c-C4F8 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.3) | |
