| Active Filters |
| | | | | | | | | | | | | |
| 214176 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | See "Comments from data provider". | | 5 | g CF4/m^2 of substrate processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214177 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 1 default: See "Comments from data provider") | See "Comments from data provider". | | | See "Comments from data provider". | | 0.2 | g CF4/m^2 of substrate processed | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.2) | |
| 214257 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.7 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214258 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.6 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214259 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214260 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214261 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.2 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214262 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | An in-situ NF3 cleaning process that is analogous to the process for other cleaning gases like C2F6 and C3F8. NF3 used in this cleaning process is referred to as simply "NF3" and distinguished from "Remote-NF3" in the 2006 IPCC Guidelines. Also, see "Comments from data provider". | | | | | 0.2 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214263 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2a) | See "Comments from data provider". | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214264 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of C2F6 in Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 2b) | See "Comments from data provider". | | | | | 0.2 | kg CF4/kg C2F6 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214265 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of C3F8 in Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 2b) | See "Comments from data provider". | | | | | 0.2 | kg CF4/kg C3F8 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214266 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of c-C4F8 in Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 2b) | See "Comments from data provider". | | | | | 0.1 | kg CF4/kg c-C4F8 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214267 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | By-Product Emission Factor for CF4 Emissions from Use of NF3 in Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 2b) | An in-situ NF3 cleaning process that is analogous to the process for other cleaning gases like C2F6 and C3F8. NF3 used in this cleaning process is referred to as simply "NF3" and distinguished from "Remote-NF3" in the 2006 IPCC Guidelines. Also, see "Comments from data provider". | | | | | 0.05 | kg CF4/kg NF3 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214268 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | By-Product Emission Factor for C2F6 Emissions from Use of c-C4F8 in Photovoltaic (PV) Manufacturing (2006 IPCC Guidelines Tier 2b) | See "Comments from data provider". | | | | | 0.1 | kg C2F6/kg c-C4F8 | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214269 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2b) | Process type: Etch | | | | | 0.7 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214270 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2b) | Process type: Etch | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214271 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2b) | Process type: Etch | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214272 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2b) | Process type: Etch | | | | | 0.2 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214273 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2b) | Process type: Etch | | | | | 0.4 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
| 214274 | - 2F6 - Other (please specify)
| | | 2006 IPCC default | Process Tool Emission Factor for Fluorinated Compound (FC) Emissions from Photovoltaic (PV) Manufacturing (= 1 - Use Rate) (2006 IPCC Guidelines Tier 2b) | Process type: Chemical Vapour Deposition (CVD) | | | | | 0.6 | fraction | 2006 IPCC Guidelines for National Greenhouse Gas Inventories (Volume 3, Chapter 6, Table 6.5) | |
